SIMS analysis of insulator samples
Insulators are difficult samples to analyze.In order to obtain good results while suppressing charge build-up, it is necessary to find an appropriate balance between the adjustment of the electron gun, the amount of current for the measurement area and the beam, and the scanning speed.Takeuchi also provided a lot of measurement support for insulator samples.
The purpose of the subject "SIMS analysis of ceramics" is to analyze the oxygen permeation behavior in ceramic films.We have stably measured the isotope oxygen tracer (18O2) distribution in various ceramics samples with different insulating properties, and were able to show the oxygen isotope distribution with a spatial resolution of about 100 nm (Fig. 5).Quantitative evaluation of oxygen permeability has become possible, and the obtained results have been published in five papers so far, and some of them have been recognized as "excellent utilization results" in the 28 platform project. was also introduced. (A-15-UT-0379, A-16-UT-0020, A-17-UT-0002, A-18-UT-0201, A-19-UT-0035 ).
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