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SIMS analysis of insulator samples

Insulators are difficult samples to analyze.In order to obtain good results while suppressing charge build-up, it is necessary to find an appropriate balance between the adjustment of the electron gun, the amount of current for the measurement area and the beam, and the scanning speed.Takeuchi also provided a lot of measurement support for insulator samples.

The purpose of the subject "SIMS analysis of ceramics" is to analyze the oxygen permeation behavior in ceramic films.We have stably measured the isotope oxygen tracer (18O2) distribution in various ceramics samples with different insulating properties, and were able to show the oxygen isotope distribution with a spatial resolution of about 100 nm (Fig. 5).Quantitative evaluation of oxygen permeability has become possible, and the obtained results have been published in five papers so far, and some of them have been recognized as "excellent utilization results" in the 28 platform project. was also introduced. (A-15-UT-0379, A-16-UT-0020, A-17-UT-0002, A-18-UT-0201, A-19-UT-0035 ).

S. Kitaoka, T. Matsudaira, et al., J. Am. Ceram. Soc., 100, 3217 (2017),
S. Kitaoka, T. Matsudaira, et al., Mater. Sci. Forum., 879, 966 (2017),
M. Wada, T. Matsudaira, et al., Acta Materialia, 135, 372 (2017),
T. Matsudaira, et al., Acta Materialia, 151, 21 (2018),
T. Matsudaira, et al., J. Europ Ceramic Soc.,

Figure 1 2O map in the cross section near the Al3O18 film surface after the oxygen permeation test. The 18O distribution is shown in white.It was clarified that the high-speed diffusion path of oxygen is the grain boundary and that there is a difference in intragranular diffusion depending on the sample.It was discovered for the first time that the grain boundary diffusion of oxygen in Al2O3 films was suppressed by the application of an oxygen potential gradient.
Appearance of Nano SIMS device