Physical properties/Electrical properties/Surface measurement equipment
Multifunctional scanning X-ray photoelectron spectrometer XPS (PHI 5000)
PHI 5000 VersaProbe / ULVAC Phi
| Minimum beam diameter | 10 μm or less |
|---|---|
| Highest energy resolution | 0.5 eV or less (Ag3d 5/2) |
| maximum sensitivity | 1,000,000 cps (Ag3d 5/2 FWHM 1.0 eV) |
| Ultimate pressure | 6.7×10-8 Pa or less |
・ Micro-area analysis by scanning microfocus X-ray source (minimum analysis area 10 μm)
・ SXI (Scanning X-ray Image) accurately and quickly identifies minute analysis positions
・ Simultaneous irradiation of low-energy electrons and ions facilitates charge neutralization of insulator samples.
・ Multi-point analysis by 5-axis (X, Y, Z, Tilt, Rotation) motor drive
Multifunctional scanning X-ray photoelectron spectrometer XPSwithAES (PHI 5000) VersaProbe III
Electron spin resonator (JES-FA300)
JES-FA300 / JEOL
| Measurement band | X band approx. 9 GHz/Q band approx. 35 GHz |
|---|---|
| Minimum measurable temperature | 10K or less |
・Equipment for electronic spin state measurement.
・Evaluation of electric field induced carrier density and dynamics is possible.
・Magnetic field dependence of magnetic resonance and g-value can be evaluated.
Spectroscopic ellipsometer M-2000U (JAWoollam)
M-2000DI-T / JA Woollam Japan
| Spec. | Rotation compensator type |
|---|---|
| Measurement wavelength | 193-1690nm |
| Number of channels | 690 simultaneous measurements |
It is possible to measure the complex refractive index and film thickness of thin films.
PPMS Electromagnetic Property Measurement Device for Extreme Environments
PPMS-14LHattt / Japan Quantum Design
| Spec. | 14 T superconducting magnet |
|---|---|
| Temperature control | 1.9K to 400K |
| sample space | 25.4 mm |
Equipped with various measurement options, it enables physical property measurement under extreme environments with a maximum magnetic field of 14T and a minimum temperature of 1.9K (<0.4K when using XNUMX helium options).We also offer a high standard of automatic measurement to enable efficient use of your time.
・Thermal properties: specific heat measurement (heat capacity), heat transport measurement (thermal conductivity, Seebeck coefficient, merit coefficient (ZT))
・Electrical properties: electric transport properties, direct current resistance
・Magnetic properties: vibrating sample magnetometer (VSM)
・System expansion functions: 3 helium refrigerators, sample rotation mechanism
Environmental control manual prober station
| Semiconductor characterization system | 4200-SCS |
|---|---|
| Ferroelectric characterization system | FCE1EEA-200 type |
| Dielectric impedance measurement system | solartron 1260 |
| Cryogenic prober equipment | CPX-VF |
| Low temperature prober (CRX-4K) | 6K to 350K |
| High temperature prober (HCP-401/400) | Room temperature to 400 degrees |
It is possible to evaluate device characteristics and electrical characteristics such as semiconductor characteristic analysis, ferroelectric characteristic analysis, and impedance analysis.