Ultra-trace elemental analysis system
Ultra trace element measurement system (NanoSIMS 50L)
NanoSIMS 50L Made by Cameca
Primary ion species | Cs+, O- (16 keV) |
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Minimum beam diameter | Cs+ < 50 nm O- < 200 nm |
Mass spectrometer | doubly convergent |
High-resolution mapping of trace elements and isotopes and analysis of minute regions are possible.
It can detect 7 types of secondary ions at the same time.